Scientific Program - News!!

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‹ Tuesday, May 14, 2019 ›

09:00

10:00

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12:00

13:00

14:00

15:00

16:00

17:00

18:00

›9:00 (1h)

Plenary 2 : A. Bailey, Equipment Intelligence™: Plasma Science Driven by Semiconductor Data
A. Bailey

› auditorium

›10:00 (30min)

H. Kino, Prediction ability and importance of descriptors of single-element physical sputtering yields based on sparse modeling
H. Kino

› auditorium

›10:30 (30min)

Coffee break

› Salle des Voûtes

›11:00 (30min)

S. Park, Control of the HARC Etching Processes in OLED Display Manufacturing Fab by Using the PI-VM Algorithm
S. Park

› auditorium

›11:30 (30min)

H. Nakada, Data-driven Development of Plasma Process: Time-series Optimization of Etching Conditions Based on Reinforcement Learning
H. Nakada

› auditorium

›12:00 (30min)

A. Solov’yov, MBN Explorer and Studio case studies with irradiation driven molecular dynamics
A. Solov’yov

› auditorium

›12:30 (1h)

Lunch

› Salle des Voûtes

›14:00 (4h)

Boat Tour to the Calanques

Session

Speech

Logistics

Break

Tour

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